JPH01155247U - - Google Patents
Info
- Publication number
- JPH01155247U JPH01155247U JP5120788U JP5120788U JPH01155247U JP H01155247 U JPH01155247 U JP H01155247U JP 5120788 U JP5120788 U JP 5120788U JP 5120788 U JP5120788 U JP 5120788U JP H01155247 U JPH01155247 U JP H01155247U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- gas
- source chamber
- gas inlet
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5120788U JPH01155247U (en]) | 1988-04-15 | 1988-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5120788U JPH01155247U (en]) | 1988-04-15 | 1988-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01155247U true JPH01155247U (en]) | 1989-10-25 |
Family
ID=31277238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5120788U Pending JPH01155247U (en]) | 1988-04-15 | 1988-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01155247U (en]) |
-
1988
- 1988-04-15 JP JP5120788U patent/JPH01155247U/ja active Pending